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Liquid Ru precursor for ALD/CVD metallization.
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Product catalogueBis(ethylcyclopentadienyl)
- Ruthenium
- TDS available after inquiry
Bis(ethylcyclopentadienyl)
Liquid Ru precursor for ALD/CVD metallization
CAS32992-96-4
FormulaC14H18Ru
Molecular weight287.36 g/mol
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