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CVD/ALD ruthenium metallization precursor; Carbonylation and hydrogenation catalysis.
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- Ruthenium
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Triruthenium dodecacarbonyl
CVD/ALD ruthenium metallization precursor
CAS15243-33-1
FormulaRu3(CO)12
Molecular weight639.33 g/mol
Product information
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Dodecacarbonyltriruthenium (TRDC) · CAS 15243-33-1
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