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Ruthenocene

Ru thin-film ALD/CVD precursor for advanced nodes

CAS1287-13-4
FormulaC10H10Ru
Molecular weight231.26 g/mol
Technical details
Product information

Ruthenocene

CAS 1287-13-4

Purity
≥ 99.9% (GC)
Trace metals
trace-metal panel to ppb levels
Volatility
volatile solid, sublimes readily

Safety data sheet and certificate of analysis

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Chemical structure of Ruthenocene
Product information

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Ru thin-film ALD/CVD precursor for advanced nodes; Electrocatalysis and redox mediators.

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